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Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing

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 |  2016-04-19 |  2016-04-19 | File type: PDF

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As science pushes closer toward the atomic size scale, new challenges arise to slow the pace of the miniaturization that has transformed our society and fueled the information age. New technologies are necessary to surpass these obstacles and realize the tremendous growth predicted by Moore's law. Assembled from the works of pioneering researchers, Scientific Wet Process Technology for Innovative LSI/FPD Manufacturing presents new developments and technologies for produc...

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