[PDF.21wm] Plasma Etching: An Introduction (Plasma -- Materials Interactions)
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Plasma Etching: An Introduction (Plasma -- Materials Interactions)
From Academic Press
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| #3429888 in eBooks | 1989-09-08 | 1989-09-08 | File type: PDF|||"The subject matter is therefore well tuned to the needs of workers in the semiconductor industry, although it would also serve as an excellent textbook for a final undergraduate year or postgraduate course on the processing of semiconductor materials. This bo
Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.
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